dc.creator | Lu, Xiong | |
dc.date.accessioned | 2020-08-22T17:20:20Z | |
dc.date.available | 2010-07-18 | |
dc.date.issued | 2008-07-18 | |
dc.identifier.uri | https://etd.library.vanderbilt.edu/etd-07102008-091533 | |
dc.identifier.uri | http://hdl.handle.net/1803/12884 | |
dc.description.abstract | In this thesis, we report our work on temperature dependence of second harmonic generation in Si/SiO2, which has led to an enhanced understanding of the physical processes associated with creation of the photo-induced electric field. The experimental data showed that the second- and third-order nonlinear susceptibilities increased with temperature. The data also showed that the number of filled electron trap states at the oxide surface, which is the origin of the photo-induced electric field, doesn’t change with temperature. Moreover, the temperature dependence of the trapping rate is a combination effect of electron-phonon scattering, and of the temperature dependence of the Si absorption coefficient and the SiO2 dielectric constant. We also report our recent SHG studies of silicon-on-Insulator (SOI) wafers and Si/SiO2/MgO structures, which show that the SHG is a very sensitive tool to monitor properties of the multi-layer structures.
In summary, we demonstrate that second harmonic generation is an effective, nondestructive technique for characterization of thin oxide and multi-interface structures. | |
dc.format.mimetype | application/pdf | |
dc.subject | si/sio2 | |
dc.subject | second harmonic generation | |
dc.subject | nonlinear susceptibility | |
dc.subject | semiconductor | |
dc.subject | SOI | |
dc.title | Studies of Si/SiO2 heterostructures using second harmonic generation | |
dc.type | dissertation | |
dc.contributor.committeeMember | Royal Albridge | |
dc.contributor.committeeMember | Sait Umar | |
dc.contributor.committeeMember | Ronald D. Schrimpf | |
dc.contributor.committeeMember | Jimmy L. Davidson | |
dc.type.material | text | |
thesis.degree.name | PHD | |
thesis.degree.level | dissertation | |
thesis.degree.discipline | Physics | |
thesis.degree.grantor | Vanderbilt University | |
local.embargo.terms | 2010-07-18 | |
local.embargo.lift | 2010-07-18 | |
dc.contributor.committeeChair | Norman H. Tolk | |